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Application of atmospheric pressure non-equilibrium plasma to nanomaterials synthesis

KEN OKAZAKI1, TOMOHIRO NOZAKI1,*

Affiliation

  1. Dept of Mechanical and Control Engineering, Tokyo Institute of Technology, 2-12-1O-okayama, Meguro, 1528552, Tokyo, Japan

Abstract

This paper overviews our recent work which focus on bottom-up nanomaterials synthesis within the scope of atmospheric pressure glow discharge. First, high-purity SWCNTs are producible only when atmospheric pressure radio-frequency discharge was applied: even moderate pressure such as 20 kPa preferentially synthesized multi-walled CNTs. Although ion damage is avoided in highly collisional plasma sheathe, the excess supply of excited species accelerates undesired catalyst coagulation. Second, microplasma synthesis of tunable photoluminescent silicon nanocrystals (Si-NCs) is presented. A mixture of Ar, H2, and SiCl4 was activated by miniaturized capacitively-coupled non-equilibrium plasma generated in a capillary glass tube with a volume less than 1 μ-liter. Room temperature photoluminescence (PL) of as-produced material synthesized with H2 = 0.7% exhibited visible red-photoluminescence (670 nm) without any posttreatment, while TEM analysis revealed 3 nm Si-NCs. The PL spectrum was monotonically blue-shifted until 520 nm with increasing hydrogen content in the feed gas (H2 = 3%)..

Keywords

Atmospheric pressure non-equilibrium plasma, Microplasma, Nanotechnology, Carbon nanotubes, Silicon nanocrystals, Photoluminescence.

Submitted at: March 1, 2008
Accepted at: July 10, 2008

Citation

KEN OKAZAKI, TOMOHIRO NOZAKI, Application of atmospheric pressure non-equilibrium plasma to nanomaterials synthesis, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 8, pp. 1910-1916 (2008)