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Design of new coatings using magnetron sputtering – numerical estimations

G. I. ŞTEFĂNESCU1, I. CIUCĂ1,*

Affiliation

  1. Politehnica University of Bucharest, Materials Science and Enginnering Faculty, Material Science Physical Metallurgy Department

Abstract

A new trend is set on coatings obtained via magnetron sputtering. Thus obtained alloys show remarkable mechanical, physical and chemical properties. These materials can be designed by adjusting the magnetron configuration. Using thermodynamic calculations an optimal magnetron setup can be designed and the structure and composition of the new material may be inferred..

Keywords

Reactive sputtering, Magnetron configuration, Enthalpy, Entropy, Atomic size difference δ, Valence electron concentration.

Submitted at: March 25, 2013
Accepted at: July 11, 2013

Citation

G. I. ŞTEFĂNESCU, I. CIUCĂ, Design of new coatings using magnetron sputtering – numerical estimations, Journal of Optoelectronics and Advanced Materials Vol. 15, Iss. 7-8, pp. 734-738 (2013)