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Diamond and polymeric-like films prepared by PECVD method

S. GAMAN1, C. MOROSANU1,* , F. DUMITRACHE2, N. APETROAEI3, S. YASTREBOV4

Affiliation

  1. National Institute for Materials Physics, Bucharest-Magurele, Romania
  2. National Institute for Plasma Laser and Radiation Physics, Bucharest-Magurele, Romania
  3. University “Alexandru Ioan Cuza” Iasi, Faculty of Physics, Bucharest, Romania
  4. A. F. Ioffe Physical-Technical Institute, St. Petersburg, 194021, Russia

Abstract

Plasma Enhanced Chemical Vapours Deposition (PECVD) is a versatile method which allows for the preparation of amorphous hydrogenated carbon films with different structures by varying the deposition parameters. We have prepared carbonic structures by PECVD technique onto quartz and silicon substrates in atmospheres of argon and methane mixtures. These films were characterized by the UV-VIS, FTIR, Raman, Ellipsometry and AFM methods. The total RF power, gas pressure (0.1 mbarr) and substrate temperatures (<1000C) were kept constant for all the depositions. Diamond-like carbon structures were obtained for a wide range of methane dilutions between 100% ÷ 20% and a narrow transition from diamondlike (DLC) to polymer-like carbon (PLC) structures between 20% ÷ 10% dilutions was found..

Keywords

DLC, PLC, PECVD, Transition DLC-PLC.

Submitted at: Nov. 14, 2006
Accepted at: May 15, 2007

Citation

S. GAMAN, C. MOROSANU, F. DUMITRACHE, N. APETROAEI, S. YASTREBOV, Diamond and polymeric-like films prepared by PECVD method, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 5, pp. 1450-1453 (2007)