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E-shaped cantilever-based MEMS piezoelectric energy harvester for low frequency applications

SALEM SAADON1,2,* , OTHMAN SIDEK2

Affiliation

  1. School of Electrical and Electronic Engineering, Universiti Sains Malaysia (USM),14300 NibongTebal, Pulau Pinang, Malaysia
  2. Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia(USM), Engineering Campus 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang, Malaysia

Abstract

The simplicity associated with piezoelectric micro-generators makes them very attractive for MEMS applications in which ambient vibrations are harvested and converted into electric energy. These micro-generators can be an alternative to the battery-based solutions in the future, especially for remote systems. In this paper, we propose a model and present the simulation of a MEMS-based energy harvester under ambient vibration excitation using the coventorware2010 approaches. This E-shaped cantilever-based MEMS energy harvester that operates under ambient excitation in frequencies of 28, 29, and 31 Hz within a base acceleration of 1g produces an output current of 20 μA, 0.42 V, and a power of 0.2 μw at 5kΩ load..

Keywords

Piezoelectric materials, Energy conversion, Shaped cantilever, MEMS.

Submitted at: Jan. 29, 2013
Accepted at: March 13, 2014

Citation

SALEM SAADON, OTHMAN SIDEK, E-shaped cantilever-based MEMS piezoelectric energy harvester for low frequency applications, Journal of Optoelectronics and Advanced Materials Vol. 16, Iss. 3-4, pp. 401-407 (2014)