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Effect of thermal annealing on the properties of the YBCO films grown by DC magnetron sputtering♣

M. BESHKOVA1,* , B. BLAGOEV1, D. KOVACHEVA2, G. MLADENOV1, T. NURGALIEV1

Affiliation

  1. Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria
  2. Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences, Acad. G. Bonchev str., bl.11, 1113 Sofia, Bulgaria

Abstract

The effect of thermal annealing on the electrical, structural and morphological properties of YBCO (YBa 2Cu3O 7-δ) superconducting films grown on LaAlO 3 (100) substrates by DC off axis magnetron sputtering were investigated. The deposited samples were thermal annealed at 530 ºC for 40 min under oxygen pressures of 200 and 500 Torr. The critical temperature (Tc) and current density (Jc) enhance and the transition width of temperature ΔT narrows with increasing oxygen pressure. A higher Tc 89.2 K and Jc 1.38 MA/cm 2 is exhibited for an annealing oxygen pressure of 500 Torr and c-axis length of 11.70 Å which corresponds to an oxygen content of 6.84. The effect of the property variations of YBCO films was established with changes in the annealing oxygen pressure..

Keywords

YBCO, Magnetron sputtering, Thermal annealing, superconducting properties, XRD.

Submitted at: Nov. 5, 2008
Accepted at: Oct. 3, 2009

Citation

M. BESHKOVA, B. BLAGOEV, D. KOVACHEVA, G. MLADENOV, T. NURGALIEV, Effect of thermal annealing on the properties of the YBCO films grown by DC magnetron sputtering♣, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 10, pp. 1537-1540 (2009)