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Experiments on scan shifts correction for coherence scanning interferometry

HUSNENI MUKHTAR1, PAUL MONTGOMERY2, FREDDY ANSTOTZ2, RÉMI BARILLON3, KUSNAHADI SUSANTO4,5, WILLY ANUGRAH CAHYADI1,*

Affiliation

  1. School of Electrical Engineering, Telkom University, Jl Telekomunikasi no.1, Bandung, 40257, Indonesia
  2. ICube Laboratory, University of Strasbourg-CNRS, 23 rue du Loess, Strasbourg, 67037, France
  3. IPHC, University of Strasbourg-CNRS, 23 rue du Loess, Strasbourg, 67037, France
  4. Geophysics, Universitas Padjadjaran, Jl Raya Jatinangor km 21, Jatinangor, 45363, Indonesia
  5. Institut de Physique du Globe de Strasbourg, University of Strasbourg-CNRS, 5 rue René Descartes, 67084 Strasbourg, France

Abstract

In this paper, a solution is proposed for solving the lateral shift of the scanned images stack in coherence scanning interferometry (CSI). Pre-image processing is performed on a captured stack of scanned images of square structures without the fringes. It is useful to identify the lateral shift response, which is then utilized to correct a subsequent series of scanned images with fringes having the same optical scanning parameters. Thus, eliminating the scan-line shift in the reconstructed images. The experiments results show that the error due to the scan-line shift can be improved qualitatively and quantitatively by around 0.6 - 0.7% at the lateral axis..

Keywords

Scan shift, Misalignment, Vertical scanning, Coherence scanning interferometry, Image processing.

Submitted at: May 16, 2023
Accepted at: Oct. 6, 2023

Citation

HUSNENI MUKHTAR, PAUL MONTGOMERY, FREDDY ANSTOTZ, RÉMI BARILLON, KUSNAHADI SUSANTO, WILLY ANUGRAH CAHYADI, Experiments on scan shifts correction for coherence scanning interferometry, Journal of Optoelectronics and Advanced Materials Vol. 25, Iss. 9-10, pp. 397-405 (2023)