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Investigation of radiofrequency plasma jets at low and atmospheric pressure by optical emission spectroscopy

I. LUCIU1,* , S. VIZIREANU1, T. ACSENTE1, E. R. IONITA1, B. MITU1, G. DINESCU1

Affiliation

  1. National Institute for Laser, Plasma and Radiation Physics, PO Box MG 36, Magurele, Bucharest, Romania

Abstract

Radiofrequency plasma jets generated in argon and nitrogen at low and atmospheric pressure have been investigated by means of Optical Emission Spectroscopy (OES) analysis. The local emissivity of the plasma along axial and radial direction of the plasma expansion has been determined by Abel inversion of the integral emission intensity. The gas temperature has been evaluated by simulating the roto-vibrational structure of the molecular bands..

Keywords

Low pressure plasma, Atmospheric pressure plasma, Optical emission spectroscopy, Abel inversion, non-equilibrium plasma.

Submitted at: March 1, 2008
Accepted at: July 10, 2008

Citation

I. LUCIU, S. VIZIREANU, T. ACSENTE, E. R. IONITA, B. MITU, G. DINESCU, Investigation of radiofrequency plasma jets at low and atmospheric pressure by optical emission spectroscopy, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 8, pp. 2015-2019 (2008)