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Mass spectrometry and ion energy analysis of the carbon TVA plasma for the synthesis of DLC films

C. SURDU-BOB1,* , G. MUSA2, V. BUCK3, I. MUSTATA1, O. FILIPOVb3, A. POUKHOVOI3

Affiliation

  1. Low Temperature Plasma Laboratory, National Institute for Lasers, Plasma and Radiation Physics, Str. Atomistilor 409, Bucharest, Romania
  2. Physics Department, Ovidius University, 124 Mamaia Blvd., 8700 Constanta, Romania
  3. Thin Film Technology Group, Dept. of. Physics, University of Duisburg-Essen, Universitatsstr.3-5, 45141 Essen, Germany

Abstract

The Thermoionic Vacuum Arc (TVA) plasma is a very powerful technique capable of producing impurity free dense films using solids as precursor. A large range of metals were successfully deposited using this technique. The use of TVA for the synthesis of DLC is only at the beginning. In order to obtain better quality DLC films using this technique, good knowledge of the plasma constituents, ion energy and density is necessary. The present work presents the first results of the carbon TVA plasma analysis. The TVA technique involves ignition of an arc plasma in the vapours of graphyte obtained by electron bombardment of a heated anode. Mass spectrometry analysis have been employed to study the background gas composition before, and during carbon TVA plasma ignition and its influence on film properties. Determination of carbon ion energy using an in-house, computer controlled ion energy analyzer is presented..

Keywords

Carbon TVA plasma, Arc plasma, DLC films, Mass spectrometry.

Submitted at: Nov. 14, 2006
Accepted at: Aug. 18, 2007

Citation

C. SURDU-BOB, G. MUSA, V. BUCK, I. MUSTATA, O. FILIPOVb, A. POUKHOVOI, Mass spectrometry and ion energy analysis of the carbon TVA plasma for the synthesis of DLC films, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 8, pp. 2657-2659 (2007)