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On the sensing gas properties of titanium dioxide films

N. IFTIMIE1,2, M. CRISAN3, A. BRAILEANU3, D. CRISAN3, A. NASTUTA1, G. B. RUSU1, P. D. POPA2, D. MARDARE1,*

Affiliation

  1. University Al. I Cuza, 11 Carol I Blvd., 11, 700506, Iasi, Romania
  2. National Institute of Research and Development for Technical Physics, 47 Mangeron Blvd., 700050, Iasi, Romania
  3. Institute of Physical Chemistry "Ilie Murgulescu", 202 Splaiul Independenţei, 060021, Bucharest, Romania

Abstract

In this paper we investigate the gas sensing properties of undoped and Pd-doped TiO2 thin films obtained by a sol-gel method onto glass and silicon substrates. The sensitivity of these films and the optimum operating temperature were studied for some reducing gases (methane, acetone, ethanol, formaldehyde and liquefied petroleum gas - LPG). Pd-doping (0.5wt.%) induces an increase of the weight percentage of the anatase phase from 74% to 94% and a decrease of both anatase and rutile crystallinity. Films deposited onto glass substrates are almost three times rougher than their counterparts deposited onto silicon substrates. All the studied films are most sensitive to formaldehyde, with a special remark for the Pddoped ones deposited onto silicon substrates..

Keywords

Pd-doped TiO2, thin film, Sol-gel method, Sensibility, Gas sensor.

Submitted at: Feb. 16, 2008
Accepted at: Aug. 28, 2008

Citation

N. IFTIMIE, M. CRISAN, A. BRAILEANU, D. CRISAN, A. NASTUTA, G. B. RUSU, P. D. POPA, D. MARDARE, On the sensing gas properties of titanium dioxide films, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 9, pp. 2363-2366 (2008)