"

Cookies ussage consent

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

I agree, do not show this message again.

Optical emission spectroscopy diagnostics of a Ni Thermionic Vacuum Arc (TVA) plasma

M. OSIAC1,2,* , C. C. SURDU-BOB3, M. BADULESCU3, C. P. LUNGU3

Affiliation

  1. National Institute for Laser, Plasma and Radiation Physics, Atomistilor 409, 077125, Bucharest, Romania
  2. Faculty of Physics,University of Craiova, 200585, Craiova, Romania
  3. aNational Institute for Laser, Plasma and Radiation Physics, Atomistilor 409, 077125, Bucharest, Romania

Abstract

Thermionic Vacuum Arc is a technology used especially for metallic thin film deposition. In TVA, the high-density plasma is localized above the anode, whereas the substrates are placed away from the core of the plasma. This enables deposition to be carried out at low substrate temperatures even for the highest melting point materials. Although it is arc plasma, the TVA can be used to prepare particle free films of pure materials. The TVA plasma parameters were evaluated using the analysis of the optical emission radiation of plasma. The plasma parameters obtained are anode (Ni pool) temperature, vapour pressure, evaporation rate and electron temperature as function of the dissipated power between electrodes. It was found that plasma parameters are increasing with the power and during arc plasma have relatively constant values..

Keywords

Thermionic Vacuum Arc, Optical emission spectroscopy.

Submitted at: March 1, 2008
Accepted at: July 10, 2008

Citation

M. OSIAC, C. C. SURDU-BOB, M. BADULESCU, C. P. LUNGU, Optical emission spectroscopy diagnostics of a Ni Thermionic Vacuum Arc (TVA) plasma, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 8, pp. 2007-2010 (2008)