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Plasma and laser processing of YZT materials for sensor applications

B. MITU1,* , S. SOMACESCU2, M. FILIPESCU1, P. OSICEANU2, V. PÂRVULESCU2, M. DINESCU1, G. DINESCU1

Affiliation

  1. National Institute for Lasers, Plasma and Radiation Physics, PO Box MG-16, 077125 Magurele Bucharest, Romania
  2. Institute of Physical Chemistry, Spl. Independentei 202, Bucharest, Romania

Abstract

Ternary oxides of zirconium, yttrium and titanium were obtained by hydrothermal method in powder form and respectively as thin films by pulsed laser deposition, under different concentrations of TiO2. The materials were investigated regarding their morphology, topography, chemical and structural characteristics. Electrical measurements were performed in order to asses their use in toxic gas sensors. A parametric range of experimental conditions corresponding to a maximum sensitivity to NOx toxic gas has been established for the thin films deposited by pulsed laser deposition..

Keywords

Ternary oxides ZrO2 - Y2O3 - TiO2, Hydrothermal synthesis, Pulsed laser deposition, RF assisted pulsed laser deposition, Gas sensors.

Submitted at: March 1, 2008
Accepted at: July 10, 2008

Citation

B. MITU, S. SOMACESCU, M. FILIPESCU, P. OSICEANU, V. PÂRVULESCU, M. DINESCU, G. DINESCU, Plasma and laser processing of YZT materials for sensor applications, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 8, pp. 2061-2067 (2008)