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Properties of the carbon thin films deposited by thermionic vacuum arc

R. VLADOIU1,* , V. CIUPINA1, C. SURDU-BOB2, C. P. LUNGU2, J. JANIK3, J. D. SKALNY4, V. BURSIKOVA5, J. BURSIK6, G. MUSA1

Affiliation

  1. Department of Physics, Ovidius University, Constanta, Romania
  2. National Institute of Plasma Physics and Laser Radiation, Bucharest-Magurele, Romania
  3. Department of Microelectronic, Slovak University of Technology, Bratislava, Slovak Republic
  4. Department of Plasma Physics, FMPI, Comenius University, Bratislava, Slovak Republic
  5. Masaryk University, Brno, Czech Republic
  6. Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Brno Czech Republic

Abstract

The aim of the present paper is to investigate the properties of the Diamond Like Carbon (DLC) film condensation from the carbon plasma generated by Thermionic Vacuum Arc (TVA) method. The carbon film is bombarded during its deposition by energetic carbon ions with established value of directed energy. Because this system can heat at elevated temperature any material, it is one of the most adequate technologies for the deposition of refractory metals with high melting points (over 3000 K), Raman spectra were analysed to identify the C phase of the deposited films and SEM (Scanning Electron Microscope) used after the nanoindentation print of different loads. Mechanical tests were carried on deposited carbon film using a Fischerscope depth sensing indentation tester. The hardness of the deposited films was found in the range of 10 to 14 GPa, typical values for DLC films and the elastic modulus was found in the range from 100 to 125 GPa..

Keywords

DLC, Mechanical properties, Thermionic Vacuum Arc.

Submitted at: Nov. 2, 2006
Accepted at: April 15, 2007

Citation

R. VLADOIU, V. CIUPINA, C. SURDU-BOB, C. P. LUNGU, J. JANIK, J. D. SKALNY, V. BURSIKOVA, J. BURSIK, G. MUSA, Properties of the carbon thin films deposited by thermionic vacuum arc, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 4, pp. 862-866 (2007)