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Sensitivity enhancement of an integrated micro-fluidic system, based on diffraction under total internal reflection♣

Y. SAROV1,2,* , TZ. IVANOV1, V. SAROVA3, I. CAPEK4, I. W. RANGELOW1

Affiliation

  1. MNES, IMNE, FEI, Technical University of Ilmenau, PF 100565, 98684 Ilmenau, Germany
  2. Central Laboratory of Optical Storage and Processing of Information, Bulgarian Academy of Sciences, P.O. Box 95, 1113 Sofia, Bulgaria
  3. Institute of Electronics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, 1784 Sofia, Bulgaria
  4. Polymer Institute, Slovak Academy of Sciences, 9 Dubravska cesta, 842 36 Bratislava, Slovakia

Abstract

This work reports an enhancement of the diffraction efficiency of a grating upon total internal reflection, which is the main part in a recently developed integrated system for micro-fluidic analysis. Experimentally, a first order diffraction efficiency of 37% is obtained, by adjusting the thickness and/or the refractive index of a thin transparent layer, which seals and isolates the grid. The application of such an optimized grating to micro-fluidic sensing increases the accuracy of the whole system by a factor of two..

Keywords

Sensors; Micro-fabrication; Total internal reflection; Diffraction gratings.

Submitted at: Nov. 5, 2008
Accepted at: Oct. 3, 2009

Citation

Y. SAROV, TZ. IVANOV, V. SAROVA, I. CAPEK, I. W. RANGELOW, Sensitivity enhancement of an integrated micro-fluidic system, based on diffraction under total internal reflection♣, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 10, pp. 1456-1459 (2009)