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Soft-lithography: Its application in solar cells, microelectronics and life sciences

P. K. SINGH1,* , V. SHARMA1, V. K. TANWAR1, S. C. JAIN1

Affiliation

  1. National Physical Laboratory, Dr. KS Krishnan Road, New Delhi-110012, India

Abstract

The soft-lithography technique and its variants, namely micro contact printing (μCP), micro replica moulding (REM) and micro moulding in capillary etc. have been reviewed. The key elements of soft-lithography: the poly-dimethylsiloxane (PDMS) properties, fabrication sequence, and assembly have been discussed. The review also looks at the efforts that are being made to modify the PDMA surface for bonding, μCP of bio-molecules etc. A of alkanethiols on noble metals is used as a resist against chemical etchants and patterning of thin Au, Ag, Ti and Pd films (features ranging from sub-μm to tens of μm) has been demonstrated on planar and curved surfaces. In addition, an array of contrasting surface properties has been made by sequential formation of self-assembled monolayer (SAM). A Y-shaped channel and a network of ten micro-channels (40-80 x 75 μm2 cross-section) has been realized in PDMS using REM. Soft-lithography, being a cheap and simple fabrication process with rapid prototyping, offers the option of low cost production of miniaturized devices, and has potential applications in microelectronics, chemical and life sciences..

Keywords

Soft-lithography, Micro contact printing, Replica moulding, Microelectronics, Life sciences.

Submitted at: Nov. 1, 2006
Accepted at: Jan. 15, 2007

Citation

P. K. SINGH, V. SHARMA, V. K. TANWAR, S. C. JAIN, Soft-lithography: Its application in solar cells, microelectronics and life sciences, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 1, pp. 127-133 (2007)