"

Cookies ussage consent

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

I agree, do not show this message again.

Structural properties of poly-Si thin films grown on ZnO:Al coated glass substrates by aluminium induced crystallisation

D. DIMOVA-MALINOVSKA1,* , O. ANGELOV1, M. KAMENOVA1, A. VASEASHTAa2, J. C. PIVINb3

Affiliation

  1. Central Laboratory for Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria
  2. Nanomaterial Processing &Characterization Laboratories, Marshall University, Huntington, WV, U.S.A.
  3. CSNSM, CNRS-IN2P3, Batiment 108, 91405 Orsay Campus, France

Abstract

The structural properties of poly-Si thin films on ZnO:Al coated glass substrates obtained by Aluminium-Induced Crystallisation (AIC) in different annealing atmospheres – air, N2, and N2 + H2, have been studied by Raman microprobe spectroscopy, optical microscopy , and X-ray diffraction . The Al, ZnO:Al and a-Si films were deposited by r.f. magnetron sputtering. Annealing in forming gas led to a better structural quality of the poly-Si films, compared to annealing in air or nitrogen. The investigation of different annealing conditions in forming gas led to the conclusion that the two-step annealing technique provided AIC poly-Si films with better crystalline properties. The results indicated that the process of AIC is suitable for the preparation of poly-Si films on ZnO:Al coated glass substrates, for solar cell applications..

Keywords

Poly-Si, ZnO, Structural properties, Raman spectroscopy.

Submitted at: Nov. 1, 2006
Accepted at: Feb. 15, 2007

Citation

D. DIMOVA-MALINOVSKA, O. ANGELOV, M. KAMENOVA, A. VASEASHTAa, J. C. PIVINb, Structural properties of poly-Si thin films grown on ZnO:Al coated glass substrates by aluminium induced crystallisation, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 2, pp. 355-358 (2007)