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The synthesis of DLC using a novel cathodic arc technique: Gas-TVA

C. SURDU-BOB1,* , G. MUSA1, R. VLADOIU2, C. P. LUNGU1

Affiliation

  1. Low Temperature Plasma Laboratory, National Institute for Laser, Plasma and Radiation Physics, Str. Atomistilor 409, Bucharest, Romania
  2. Physics Department, Ovidius University, 124 Mamaia Blvd., 8700 Constanta, Romania

Abstract

An original deposition technique was developed for the synthesis of DLC from methane and is presented here for the first time. The technique is based on the ignition of a cathodic arc plasma in the vapours of the material of interest, similar to the Thermoionic Vacuum Arc (TVA) method [1]. The novelty here consists in using a flow of methane as anode, instead of the carbon rod used in the classic TVA method. This extends enormously the applicability of the TVA technique for the synthesis of materials from solid precursors to the synthesis of thin films using gas precursors. A wider range of complex materials can be now obtained. The present paper presents the first results obtained with the Gas-TVA. Optical spectroscopy measurements of the methane plasma ignited using the Gas-TVA method have clearly shown dissociation of the CH4 molecule into different radicals. The composition, adherence and morfology of the films deposited using this new technique were investigated. The DLC films were found to be made of hydrogenated amorphous Carbon with relatively high sp3 content, extremely adherent and smooth..

Keywords

Gas-TVA, Arc plasma, Gas precursors.

Submitted at: Nov. 14, 2006
Accepted at: Aug. 18, 2007

Citation

C. SURDU-BOB, G. MUSA, R. VLADOIU, C. P. LUNGU, The synthesis of DLC using a novel cathodic arc technique: Gas-TVA, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 8, pp. 2660-2662 (2007)