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Thermal decomposition study by DTA-TG-MS of cerium[III] acetylacetonate used as ceria thin film precursor

T. RISTOIU1,* , L. CIONTEA1, R.-C. SUCIU1, T. PETRISOR Jr.1, M. S. GABOR1, GY. THALMAYER1, T. PETRISOR1

Affiliation

  1. Materials Science Laboratory, Technical University of Cluj–Napoca, Str. C. Daicoviciu 15, Cluj-Napoca, Romania

Abstract

Metal acetylacetonates (beta-di-ketonates), M(C5H7O2)z, are coordination compounds containing bidentate ligands. Due to their intrinsic properties they are extensively used as precursors both for solution and vapor deposition of oxide thin films. The cerium oxide (ceria) films have received a great interest due to their special optical and electrical properties. The potential applications of CeO2 films regard silicon-on-insulator structures, barrier layers, capacitor devices, solid oxide fuel cells, etc. The thermal decomposition of cerium(III) acetylacetonate hydrate in dynamical argon atmosphere and in static air has been studied by simultaneous differential thermal analysis-thermogravimetry-mass spectrometry (DTA-TG-MS) under a heating rate of 10oC/min. The DTA-TG-MS is powerful tool to analyze the complicated successive and superposed reactions accompanying the formation of the intermediate decomposition products to give the final cerium oxide. The total weight loss of 63.05 % is distributed in four major stages (calculated x=1.5). As it was revealed by the peaks observed in the mass spectra (m/z = 43, 58, 27, 42, 15), the weight losses in the temperature range (60-194oC, 194-277oC, 277-350oC) can be attributed to the evolvement of acetone. The last stage, in the temperature range from 350oC to 720oC, is attributed to the acetic ion and carbon dioxide evolvement, as it was suggested by the MS peaks at m/z values (45, 43, 15) and m/z=44, respectively..

Keywords

Acetylacetonate, Thermal decomposition, DTA-TG-MS, Ceria thin film.

Submitted at: Feb. 25, 2008
Accepted at: Aug. 28, 2008

Citation

T. RISTOIU, L. CIONTEA, R.-C. SUCIU, T. PETRISOR Jr., M. S. GABOR, GY. THALMAYER, T. PETRISOR, Thermal decomposition study by DTA-TG-MS of cerium[III] acetylacetonate used as ceria thin film precursor, Journal of Optoelectronics and Advanced Materials Vol. 10, Iss. 9, pp. 2223-2227 (2008)