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Thermal post-processing of spray-pyrolysis deposited ZnO thin films

N. STARBOV1,* , E. KRUMOV1, B. KJOSEV1, A. RACHKOVA1, K. STARBOVA1

Affiliation

  1. Central Laboratory of Photoprocesses “Acad. J. Malinowski”, Bulgarian Academy of Sciences, ul. Acad. G. Bonchev, Block 109, 1113 Sofia, Bulgaria

Abstract

Spray-pyrolysis deposited ZnO thin films, subjected to non-isothermal annealing and excimer laser modification, are studied. X-ray diffraction, optical spectrophotometry and scanning electron microscopy are applied for identifying, analysing and imaging the phase composition, optical properties and surface morphology respectively. The electrical conductivity of the ZnO films is estimated on the basis of DC resistance measurements. Comparison of the physical properties of samples subjected to conventional and laser stimulated thermal post-processing is performed. The advantages of laser modification for obtaining good quality crystalline ZnO coatings having a wurtzit structure are demonstrated..

Keywords

Zinc oxide, Thin films, Thermal treatment, Physical properties.

Submitted at: Nov. 1, 2006
Accepted at: Feb. 15, 2007

Citation

N. STARBOV, E. KRUMOV, B. KJOSEV, A. RACHKOVA, K. STARBOVA, Thermal post-processing of spray-pyrolysis deposited ZnO thin films, Journal of Optoelectronics and Advanced Materials Vol. 9, Iss. 2, pp. 245-247 (2007)